E07600 - SEMI E76 - Guide for 300 mm Process Equipment Points of Connection to Facility Services StdPbc-0523 This Standard defines the specification

This Standard defines the specification for ultra large size substrate case used in flat panel display (FPD) manufacturing process

to be used for the equipment control in flow shop type manufacturing line

The PSEM consists of equipment characteristics and behaviors that apply to this class of equipment and are required to be implemented in addition to the fundamental requirements and additional capabilities specified in SEMI E30 (GEM)

SEMI D61-1110 (first published)

E07600 - SEMI E76 - Guide for 300 mm Process Equipment Points of Connection to Facility Services StdPbc-0523 This Standard defines the specificationNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 Factory design variations make it difficult for equipment manufacturers to predict or agree on consistent points of connection for hookup of equipment to facility services. Similarly, device manufacturers