C02000 - SEMI C20 - Specification and Guide for Ammonium Fluoride 40% StdTpc-Silicon SEMI 3D16-1116 (first published)

SEMI 3D16-1116 (first published)

originally published in 1988

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SEMI C44-0618 (technical revision)

C02000 - SEMI C20 - Specification and Guide for Ammonium Fluoride 40% StdTpc-Silicon SEMI 3D16-1116 (first published)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for ammonium fluoride 40% used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give