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CMP criteria can be determined by metrology technology in both contact methods such as: micro profilometer
SEMI C54-1103 (first published)
SEMI C21-0600 (technical revision)
It is meant to provide consistency in terminology among gas suppliers and to provide a general guideline for users of these gases
C06600 - SEMI C66 - Guide for Trimethylaluminium (TMAI), 99.5% Quality StdPbc-0912 CMP criteria can be determinedThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www. semiviews. org and www. semi. org in March 2017; originally published February 2008. The purpose of this Document is to provide a guide for trimethylaluminum (TMAl) used in the semiconductor industry. The scope of this Document covers a
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