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P04700 - SEMI P47 - Test Method for Evaluation of Line-Edge Roughness and Linewidth Roughness Revision:SEMI P47-0307 - Superseded OPV/DSSC/PSC needs more photoelectric conversion

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Description

OPV/DSSC/PSC needs more photoelectric conversion response time caused by specific material properties

SEMI E90-0999 (first published)

SEMI M12-0303 (technical revision)

本測定方法は,

P04700 - SEMI P47 - Test Method for Evaluation of Line-Edge Roughness and Linewidth Roughness Revision:SEMI P47-0307 - Superseded OPV/DSSC/PSC needs more photoelectric conversionThis Standard was technically approved by the Microlithography Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 6, 2013. Available at www. semiviews. org and www. semi. org in May 2013; originally published March 2007. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or

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